PhD Planar Stage Technology Development at Eindhoven University of Technology

Eindhoven University of Technology has an opening PhD position. Applications will be evaluated immediately.

This PhD position (starting August 2020)at the Control Systems group of the Electrical Engineering department of TU/e is part of a research consortium aiming at the development of high-precision planar stage technology as part of an IT2 project together with ASML, Prodrive and VDL ETG.

To enable 2nm node technology and 200 wafer per hours productivity for preserving the leading role of EU in Integrated Circuit (IC) manufacturing, a new generation of ultra-high precision electro-magnetic (EM) positioning systems is required that enable precise control of the magnetically levitated stage and its spatial deformations together with complete environmental decoupling (wireless stage). The aim is at establishing a novel moving-magnet planar motor technology that enables single stroke, point-of-interest (POI) positioning of wafers below 0.5nm accuracy with high-acceleration motion profiles.

The objective of this PhD research is making a significant step in advancing high-precision motion control of planar stage actuators to achieve the above specified accuracy and productivity objectives. The research involves significant laboratory work in terms of implementation and experimental verification of the research results on a prototype stage developed at TU/e in collaboration with industrial partners.

For more information contact dr. Roland Toth (r.toth[a] Or see More information on employment conditions can be found here:

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